Ozone is an important greenhouse gas and an air pollutant that forms chemically in the atmosphere and affects human health and ecosystems. Ozone deposition, its removal at the land surface, is a sink of atmospheric ozone. Upon uptake by plant stomata, ozone reduces ecosystem carbon uptake, thereby increasing atmospheric CO2. This thesis advances process understanding of ozone dry deposition at a range of scales. In Chapter 2, the dependence of ozone on its precursor NOx is investigated during a European summer season. In Chapter 3 and 4, the different sinks of ozone to vegetation are investigated using a multi-layer canopy model and long-term and short-term observational records. Lastly, dry deposition patterns are studied in a high-resolution model bridging the scales between the first three chapters. Overall, the findings of this thesis contribute to a better understanding of ozone deposition, benefitting assessments of ozone air pollution and its impacts on ecosystems.